Real-time control and data acquisition system for 3D micro electrochemical milling

被引：0
|
作者：
Liu Y. [1 ]
Zeng Y.-B. [1 ]
Zhu D. [1 ]
Huang S.-F. [1 ]
Wang S.-H. [1 ]
机构：
[1] College of Mechanical Electrical Engineering, Nanjing University of Aeronautics and Astronautics
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2010年 / 18卷 / 06期
关键词：
Data acquisition; Feedback control; Labwindows/CVI; Micro electrochemical milling; Milling by layer;
D O I：
10.3788/OPE.20101806.1309
中图分类号：
学科分类号：
摘要：
In order to realize the real-time control and detection of three-dimensional micro electrochemical milling process, a data acquisition and control system is established based on virtual instrument software Labwindows/CVI. The three-dimensional tool path generation and control strategy, data acquisition and anti-jamming algorithm and the machining time error compensation algorithm for the system are investigated. Firstly, the requirements of the control and detection system are analyzed according to the characteristics of micro electrochemical milling process and a high-precision experimental system for 3D micro electrochemical milling is built up. Then, the feed control module for three-dimensional tool path is established based on a virtual instrument platform, and the optimization of tool path is discussed. Finally, the data acquisition and its feedback control module and the machining time error compensation function are introduced. On the basis of the system above, a three-step staircase structure with one stair of 15 μm × 55 μm × 15 μm is fabricated successfully. It shows that the system can meet the requirements of micro electrochemical milling for high machining precision, fast response, accuracy control and reliable and stable abilities.
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页码：1309 / 1318
页数：9
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