Characterization of ion energy distribution in inductively coupled argon plasmas sustained with multiple internal-antenna units

被引：0
|
作者：
Takenaka, Kosuke [1 ]
Setsuhara, Yuichi [1 ]
Nishisaka, Kazuaki [2 ]
Ebe, Akinori [2 ]
机构：
[1] Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka 567-0047, Japan
[2] EMD Corporation, Kyoto 615-8245, Japan
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 8 PART 3期
关键词：
We have characterized the ion energy distribution in argon plasmas sustained by multiple internal antenna units as a function of Ar pressure. The distribution has been measured using an ion energy analyzer with a mass separator. The peak of ion energy distribution depended more strongly on pressure and corresponded to the magnitude of plasma potential. The full width at half maximum of the distributions decreased with decreasing antenna RF voltage caused by a decrease in Ar pressure. © 2008 The Japan Society of Applied Physics;
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页码：6900 / 6902
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