Characterization of ion energy distribution in inductively coupled argon plasmas sustained with multiple internal-antenna units

被引：0
|
作者：
Takenaka, Kosuke [1 ]
Setsuhara, Yuichi [1 ]
Nishisaka, Kazuaki [2 ]
Ebe, Akinori [2 ]
机构：
[1] Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka 567-0047, Japan
[2] EMD Corporation, Kyoto 615-8245, Japan
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 8 PART 3期
关键词：
We have characterized the ion energy distribution in argon plasmas sustained by multiple internal antenna units as a function of Ar pressure. The distribution has been measured using an ion energy analyzer with a mass separator. The peak of ion energy distribution depended more strongly on pressure and corresponded to the magnitude of plasma potential. The full width at half maximum of the distributions decreased with decreasing antenna RF voltage caused by a decrease in Ar pressure. © 2008 The Japan Society of Applied Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：6900 / 6902
相关论文
共 50 条
  • [21] Response to "Comment on 'Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas'" [Phys. Plasmas 22, 044701 (2015)]
    Kim, June Young
    Kim, Young-Cheol
    Kim, Yu-Sin
    Chung, Chin-Wook
    PHYSICS OF PLASMAS, 2015, 22 (04)
  • [22] Control of the spatial distribution of ion flux in dual inductively coupled plasmas
    Cho, Sung-Won
    Moon, Jun-Hyeon
    Zhang, Aixian
    Chung, Chin-Wook
    JOURNAL OF APPLIED PHYSICS, 2021, 129 (10)
  • [23] Evidence for the distribution of iron atoms in argon inductively coupled plasmas according to the boltzmann population
    Nakamura, Susumu
    Journal of Analytical Atomic Spectrometry, 1995, 10 (06):
  • [24] Characterization of inductively-coupled RF plasma sources with multiple low-inductance antenna units
    Takenaka, Kosuke
    Setsuhara, Yuichi
    Nishisaka, Kazuaki
    Ebe, Akinori
    Sugiura, Shinya
    Takahashi, Kazuo
    Ono, Koichi
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (10B): : 8046 - 8049
  • [25] Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas
    Brihoum, Melisa
    Cunge, Gilles
    Darnon, Maxime
    Gahan, David
    Joubert, Olivier
    Braithwaite, Nicholas St. J.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2013, 31 (02):
  • [26] Lorentz force effects on the electron energy distribution in inductively coupled plasmas
    Godyak, VA
    Alexandrovich, BM
    Kolobov, VI
    PHYSICAL REVIEW E, 2001, 64 (02): : 10 - 264061
  • [27] Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas
    Hebner, GA
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (05) : 2624 - 2636
  • [28] EVIDENCE FOR THE DISTRIBUTION OF IRON ATOMS IN ARGON INDUCTIVELY-COUPLED PLASMAS ACCORDING TO THE BOLTZMANN POPULATION
    NAKAMURA, S
    JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY, 1995, 10 (06) : 467 - 470
  • [29] Time-resolved ion energy distribution in pulsed inductively coupled argon plasma with/without DC bias
    Chen, Zhiying
    Blakeney, Joel
    Carruth, Megan
    Ventzek, Peter L. G.
    Ranjan, Alok
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2022, 40 (03):
  • [30] Ion energy and angular distributions in inductively coupled radio frequency discharges in argon
    Woodworth, JR
    Riley, ME
    Meister, DC
    Aragon, BP
    Le, MS
    Sawin, HH
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (03) : 1304 - 1311
12345