Modeling of positional plasma characteristics by inserting body tube of optical emission spectroscopy for plasma assisted atomic layer deposition system

被引：0

作者：

School of Electrical and Electronic Engineering, Yonsei University, Seoul ^{[1
]}

120-749, Korea, Republic of

机构：

来源：

ICEP-IAAC - Int. Conf. Electron. Packag. iMAPS All Asia Conf. | / 638-641期

关键词：

Engineering Village;

D O I：

7111092

中图分类号：

学科分类号：

摘要：

Analytic modeling - Body Tube component - Detection capability - Manufacturability - Optical emission spectroscopies (OES) - Plasma assisted atomic layer depositions - Plasma characteristics - Plasma uniformity

引用