Growth and characterization of titanium oxides films deposited by electron beam evaporation

被引：0
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作者：
Lin, Zeng [1 ,2 ]
Wang, Yong [1 ]
Han, Yongchao [1 ]
Ba, Dechun [1 ]
Liu, Chunming [2 ]
机构：
[1] Shool of Mechanical Engineering and Automation, Northeastern University, Shenyang 110004, China
[2] Shool of Materials and Metallurgy, Northeastern University, Shenyang 110004, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2010年 / 30卷 / 04期
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页码：401 / 404
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