Micromachined silicon submount for optical communication devices

被引：0

作者：

Ishii, Yorishige ^{[1
]}

Matsuo, Toshihisa ^{[1
]}

Fujita, Hideaki ^{[1
]}

Iwaki, Tetsuo ^{[2
]}

Sekimoto, Yoshihiro ^{[1
]}

Kurata, Yukio ^{[1
]}

机构：

[1] Precision Technology Development Center, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan

[2] Design Systems Development Center, SHARP Corporation, 2613-1 Ichinomoto-cho, Tenri, Nara 632-8567, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 12期

关键词：

D O I：

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中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：9088 / 9093

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