Design of electrostatic levitation loop for six-axis micromachined accelerometer

被引：0

作者：

Duan, Guang-Wu ^{[1
]}

Han, Feng-Tian ^{[1
]}

Fu, Zhen-Bin ^{[1
]}

机构：

[1] Department of Precision Instrument and Mechanology, Tsinghua University, Beijing 100084, China

来源：

Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology | 2010年 / 18卷 / 02期

关键词：

Finite element method - Electrostatics - Accelerometers - Glass - Image enhancement;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The traditional electrostatically levitated accelerometer used in very weak space acceleration measurement could achieve extremely high resolution. So a six-axis accelerometer is presented based on electrostatic suspension. The sensor is realized in a glass-silicon-glass sandwich structure and fabricated by bulk silicon micromachining. The proof mass features a ″photo frame″ shape to improve the radial measurement range and suspension stiffness. A finite element analysis is performed to simulate the air film damping of the proof-mass in atmospheric environment. The electrostatically levitated system is modeled and analyzed, and a control scheme is presented to achieve the measurement of the six-axis acceleration. The simulation results of the suspension control loops are presented to evaluate the performance of the six-axis accelerometer.

引用

页码：209 / 213