Improvement of the alignment accuracy of differential grating

被引:0
作者
Department of Automatic Control, Southeast University, Nanjing 210096, China [1 ]
不详 [2 ]
机构
来源
Jiliang Xuebao | 2006年 / 1卷 / 7-11期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
[41]   Spaln3: improvement in speed and accuracy of genome mapping and spliced alignment of protein query sequences [J].
Gotoh, Osamu .
BIOINFORMATICS, 2024, 40 (08)
[42]   IMPROVEMENT OF COUPLING EFFICIENCY IN GRATING COUPLER BY INTRODUCTION OF DOUBLE GRATING [J].
KIRIMOTO, T ;
MATSUHARA, M ;
KUMAGAI, N .
ELECTRONICS & COMMUNICATIONS IN JAPAN, 1978, 61 (08) :79-86
[43]   Goal alignment in process improvement [J].
Lepmets, Marion ;
McBride, Tom ;
Ras, Eric .
JOURNAL OF SYSTEMS AND SOFTWARE, 2012, 85 (06) :1440-1452
[44]   Application of round grating angle measurement composite error amendment in the online measurement accuracy improvement of large diameter [J].
Wang, Biao ;
Yu, Xiaofen ;
Li, Qinzhao ;
Zheng, Yu .
7TH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION AND CONTROL TECHNOLOGY: MEASUREMENT THEORY AND SYSTEMS AND AERONAUTICAL EQUIPMENT, 2008, 7128
[45]   High-accuracy alignment of the grating pattern along silicon ⟨1 1 2⟩ directions using a short rectangular array [J].
Wang, Yu ;
Liu, Zhengkun ;
Zheng, Yanchang ;
Qiu, Keqiang ;
Hong, Yilin .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017, 27 (06)
[46]   Improved wafer stepper alignment performance using an enhanced phase grating alignment system [J].
Neijzen, JHM ;
Morton, RD ;
Dirksen, P ;
Megens, HJL ;
Bornebroek, F .
METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XIII, PTS 1 AND 2, 1999, 3677 :382-394
[48]   Positioning Accuracy Improvement of a Vision-based Optical Fiber Alignment Stage Powered by a Piezo-Actuator [J].
Wen, Chun-Ming ;
Cheng, Ming-Yang .
2008 INTERNATIONAL WORKSHOP ON ROBOTIC AND SENSORS ENVIRONMENTS, 2008, :70-75
[49]   The Accuracy Evaluation Research on Transfer Alignment [J].
Sun, Feng ;
Lv, YuHong ;
Wang, Gen ;
Wang, JiaNan .
2008 INTERNATIONAL CONFERENCE ON MECHATRONICS AND AUTOMATION: (ICMA), VOLS 1 AND 2, 2008, :378-384
[50]   Fold recognition by predicted alignment accuracy [J].
Xu, JB .
IEEE-ACM TRANSACTIONS ON COMPUTATIONAL BIOLOGY AND BIOINFORMATICS, 2005, 2 (02) :157-165