Improvement of compact electron-beam-excited plasma source for increased producible plasma density

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Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan [1 ]
不详 [2 ]
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Jpn. J. Appl. Phys. | 1600年 / 7 PART 1卷
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