Improvement of compact electron-beam-excited plasma source for increased producible plasma density

被引：0
|
作者：
Toyota Technological Institute, 2-12-1 Hisakata, Tenpaku-ku, Nagoya 468-8511, Japan [1 ]
不详 [2 ]
机构：
来源：
Jpn. J. Appl. Phys. | 1600年 / 7 PART 1卷
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Graphite electrodes
引用
收藏
相关论文
共 50 条
  • [1] Improvement of Compact Electron-Beam-Excited Plasma Source for Increased Producible Plasma Density
    Ichiki, Ryuta
    Hara, Tamio
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2009, 48 (07)
  • [2] Cleaning of glass disk in oxygen plasma by using compact electron-beam-excited plasma source
    Tada, S., 1600, Japan Society of Applied Physics (41):
  • [3] Cleaning of glass disk in oxygen plasma by using compact electron-beam-excited plasma source
    Tada, S
    Ito, M
    Hamagaki, M
    Hori, M
    Goto, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (11A): : 6553 - 6556
  • [4] Deposition of diamond-like carbon using compact electron-beam-excited plasma source
    Tada, S
    Ito, M
    Hamagaki, M
    Hori, M
    Goto, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (08): : 5408 - 5414
  • [5] Deposition of diamond-like carbon using compact electron-beam-excited plasma source
    Tada, Shigekazu
    Ito, Masafumi
    Hamagaki, Manabu
    Hori, Masaru
    Goto, Toshio
    1600, Japan Society of Applied Physics (41):
  • [6] Potential profiles in an electron-beam-excited plasma
    Hamagaki, Manabu
    Hara, Tamio
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1994, 33 (7 B): : 4369 - 4372
  • [7] POTENTIAL PROFILES IN AN ELECTRON-BEAM-EXCITED PLASMA
    HAMAGAKI, M
    HARA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7B): : 4369 - 4372
  • [8] Production of high-density plasmas in electron-beam-excited plasma device
    Ito, Akihiro, 1600, JJAP, Minato-ku, Japan (33):
  • [9] Nitriding of a tool, steel with an electron-beam-excited plasma
    Shoyama, H.
    Hishida, T.
    Hara, T.
    Dake, Y.
    Mori, T.
    Nagai, H.
    Hori, M.
    Goto, T.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (06): : 1999 - 2002
  • [10] CONTROL OF FLOATING POTENTIAL IN AN ELECTRON-BEAM-EXCITED PLASMA
    HAMAGAKI, M
    HARA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1994, 33 (3A): : L383 - L386
12345