Design of tri-axis capacitive MEMS accelerometer based on single mass

被引：0

作者：

Chen, Liguo ^{[1
]}

Yuan, Fei ^{[1
]}

Chen, Tao ^{[1
]}

Sun, Lining ^{[1
]}

机构：

[1] Robotics and Microsystems Center & Collaborative Innovation Center of Suzhou Nano Scienceand Technology, Soochow University, Suzhou,215021, China

来源：

Zhendong Ceshi Yu Zhenduan/Journal of Vibration, Measurement and Diagnosis | 2015年 / 35卷 / 05期

关键词：

Anti-jamming capability - Capacitive accelerometers - Capacitive detection - Comb-finger structure - Consumer electronics applications - Micro electro mechanical system - Sensitive mass - Tri-axis accelerometers;

D O I：

10.16450/j.cnki.issn.1004-6801.2015.05.021

中图分类号：

学科分类号：

摘要：

The design, manufacture and test of a tri-axis capacitive MEMS accelerometer based on the single mass are presented. This acceleration sensor takes advantage of single mass structure to reduce the MEMS dimensions and decrease the cost. To match the sensitivity design requirement, the differential capacitive detection is utilized, and the sensitivity coupling problem of three orthogonal axes is avoided. The mass and comb finger structure are based on the EPI-poly process to realize the 18 μm thickness. The detection capacitance, sensitivity and reliability are improved, and the mechanical noise is decreased. The ANSYS simulation results show that the sensor is consistent in three axes with good anti jamming capability. The testing results agree with the simulation data. Thanks to the simple structure and process, the single-mass tri-axis capacitive accelerometer can be widely used in consumer electronics applications. ©, 2015, Nanjing University of Aeronautics an Astronautics. All right reserved.

引用

页码：932 / 937

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