Simulation of reactive distillation coupled with absorption process for monosilane production

A reactive distillation coupled with absorption process for monosilane production was proposed for improving condenser temperature. The process was developed and simulated in Aspen Plus. Accurate results could be obtained when the equilibrium stage model took reaction kinetics and chemical equilibrium into account. The operating parameters were determined by varying the distillate rate and the reflux ratio. The results show that the yield of monosilane approaches 100% and the condenser temperature is -17℃. Effects of absorbent rate, recycle stream stage and liquid holdup were investigated. The operating costs of single column process, double column process and absorption process were estimated. The evaluation results demonstrate the absorption process is feasible in industry because of its high condenser temperature, low equipment maintenance cost and moderate operating cost.