共 20 条
[1]
Chu S., Application of FBR technology, China Silicon Industry, 3, 12, (2010)
[2]
Technology overview of monosilane deposition for polysilicon production, Fine and Specialty Chemicals Semimonthly Supplement: Silicone, 4, pp. 31-34, (2009)
[3]
Muller D., Ronge G., Schafer J.P., Et al., Development and economic evaluation of a reactive distillation process for silane production, International Conference on Distillation and Absorption, pp. 1-11, (2002)
[4]
Bakay C.J., Process for Making Silane: US
[5]
Block H.D., Leimkuhler H.J., Muller D., Et al., Method and System for Producing Silane: US
[6]
Muller D., Ronge G., Schafer J.P., Et al., Method and Facility for Producing Silane: US
[7]
Block H.D., Mleczko L., Leimkuhler H.J., Et al., Method for Production of High purity Silicon: US
[8]
Huang G., Shi Q., Wang H., Et al., Method and Facility for Boron Removal in Chlorosilanes by Reactive Distillation
[9]
Huang G., Shi Q., Wang H., Et al., Method and Equipment for Boron Removal in Chlorosilanes by Dividing Wall Column: CN
[10]
Huang G., Wang H., Li X., Et al., System and Method for Purifying Trichlorosilane Using Different Pressure Thermally Disillation Technology