Tunneling and thermionic emission as charge transport mechanisms in W-based Schottky contacts on AlGaN/GaN heterostructures

被引:0
|
作者
Milazzo, Simone [1 ,2 ]
Greco, Giuseppe [2 ]
Di Franco, Salvatore [2 ]
Fiorenza, Patrick [2 ]
Giannazzo, Filippo [2 ]
Bongiorno, Corrado [2 ]
Gervasi, Leonardo [3 ]
Mirabella, Salvatore [4 ,5 ]
Iucolano, Ferdinando [3 ]
Roccaforte, Fabrizio [2 ]
机构
[1] Univ Catania, Dept Chem Sci, Viale Andrea Doria 6, I-95125 Catania, Italy
[2] CNR, IMM HQ, Str 8,n5 Zona Ind, I-95121 Catania, Italy
[3] STMicroelect, Stradale Primosole 50, I-95121 Catania, Italy
[4] Univ Catania, Dept Phys & Astron Ettore Majorana, Via Santa Sofia 64, I-95123 Catania, Italy
[5] CNR, IMM, Catania Univ Unit, Via Santa Sofia 64, I-95123 Catania, Italy
关键词
AlGaN/GaN; Schottky contacts; Conduction mechanisms; Metal/AlGaN interface; Conductive dislocations; C-AFM; THREADING DISLOCATIONS; GATE LEAKAGE; P-N; POLARIZATION; ELECTRONS; CURRENTS; DIODES; FILMS;
D O I
10.1016/j.apsusc.2024.161316
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This paper investigates the forward conduction mechanism of W-based Schottky diodes on AlGaN/GaN heterostructures across a temperature range of 25-150 degrees C. Current-Voltage measurements carried out at different temperatures (I-V-T), allow to identify two coexisting mechanisms for charge transport. At lower bias the conduction mechanism is ruled by tunneling (TU), with a characteristic energy of E-00 = 75 meV extracted from the temperature dependence of the ideality factor. At higher bias the Thermionic Emission (TE) mechanism dominates, thus revealing the presence of an inhomogeneous barrier that increases from 0.77 to 0.94 eV with increasing the measurement temperature. An ideal barrier of 1.22 eV was extrapolated for a unitary ideality factor. Structural and electrical analyses performed at nanoscale level revealed the presence of a density of defects (dislocations) in the order of 4 x 10(9) cm(-2). Conductive Atomic Force Microscopy (C-AFM) provided local electrical information, uncovering a significant correlation between the observed electrical characteristics and the nanoscale defect distribution. This detailed insight highlights the crucial role of the electrical characteristics of defects in influencing the tunneling current component at low bias, thereby providing valuable context for understanding the electrical behavior and performance of microscopic devices.
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页数:7
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