Tunneling and thermionic emission as charge transport mechanisms in W-based Schottky contacts on AlGaN/GaN heterostructures

被引:0
作者
Milazzo, Simone [1 ,2 ]
Greco, Giuseppe [2 ]
Di Franco, Salvatore [2 ]
Fiorenza, Patrick [2 ]
Giannazzo, Filippo [2 ]
Bongiorno, Corrado [2 ]
Gervasi, Leonardo [3 ]
Mirabella, Salvatore [4 ,5 ]
Iucolano, Ferdinando [3 ]
Roccaforte, Fabrizio [2 ]
机构
[1] Univ Catania, Dept Chem Sci, Viale Andrea Doria 6, I-95125 Catania, Italy
[2] CNR, IMM HQ, Str 8,n5 Zona Ind, I-95121 Catania, Italy
[3] STMicroelect, Stradale Primosole 50, I-95121 Catania, Italy
[4] Univ Catania, Dept Phys & Astron Ettore Majorana, Via Santa Sofia 64, I-95123 Catania, Italy
[5] CNR, IMM, Catania Univ Unit, Via Santa Sofia 64, I-95123 Catania, Italy
关键词
AlGaN/GaN; Schottky contacts; Conduction mechanisms; Metal/AlGaN interface; Conductive dislocations; C-AFM; THREADING DISLOCATIONS; GATE LEAKAGE; P-N; POLARIZATION; ELECTRONS; CURRENTS; DIODES; FILMS;
D O I
10.1016/j.apsusc.2024.161316
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
This paper investigates the forward conduction mechanism of W-based Schottky diodes on AlGaN/GaN heterostructures across a temperature range of 25-150 degrees C. Current-Voltage measurements carried out at different temperatures (I-V-T), allow to identify two coexisting mechanisms for charge transport. At lower bias the conduction mechanism is ruled by tunneling (TU), with a characteristic energy of E-00 = 75 meV extracted from the temperature dependence of the ideality factor. At higher bias the Thermionic Emission (TE) mechanism dominates, thus revealing the presence of an inhomogeneous barrier that increases from 0.77 to 0.94 eV with increasing the measurement temperature. An ideal barrier of 1.22 eV was extrapolated for a unitary ideality factor. Structural and electrical analyses performed at nanoscale level revealed the presence of a density of defects (dislocations) in the order of 4 x 10(9) cm(-2). Conductive Atomic Force Microscopy (C-AFM) provided local electrical information, uncovering a significant correlation between the observed electrical characteristics and the nanoscale defect distribution. This detailed insight highlights the crucial role of the electrical characteristics of defects in influencing the tunneling current component at low bias, thereby providing valuable context for understanding the electrical behavior and performance of microscopic devices.
引用
收藏
页数:7
相关论文
共 38 条
  • [21] IUCOLANO F, 2007, J APPL PHYS, V102, DOI DOI 10.1063/1.2817647
  • [22] Forward Current Transport Properties of AlGaN/GaN Schottky Diodes Prepared by Atomic Layer Deposition
    Kim, Hogyoung
    Choi, Seok
    Choi, Byung Joon
    [J]. COATINGS, 2020, 10 (02)
  • [23] Direct observation of nanometer-scale gate leakage paths in AlGaN/GaN and InAlN/AlN/GaN HEMT structures
    Kotani, Junji
    Yamada, Atsushi
    Ishiguro, Tetsuro
    Tomabechi, Shuichi
    Nakamura, Norikazu
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2016, 213 (04): : 883 - 888
  • [24] Tensile strain-induced formation of micro-cracks for AlGaN/GaN heterostructures
    Kotani, Junji
    Tomabechi, Shuichi
    Miyajima, Toyoo
    Nakamura, Norikazu
    Kikkawa, Toshihide
    Watanabe, Keiji
    Imanishi, Kenji
    [J]. PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 10, NO 5, 2013, 10 (05): : 808 - 811
  • [25] Trapping phenomena in AlGaN/GaN HEMTs: a study based on pulsed and transient measurements
    Meneghesso, Gaudenzio
    Meneghini, Matteo
    Bisi, Davide
    Rossetto, Isabella
    Cester, Andrea
    Mishra, Umesh K.
    Zanoni, Enrico
    [J]. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2013, 28 (07)
  • [26] A structural analysis of ultrathin barrier (In)AlN/GaN heterostructures for GaN-based high-frequency power electronics
    Narin, Polat
    Kutlu-Narin, Ece
    Atmaca, Gokhan
    Sarikavak-Lisesivdin, Beyza
    Lisesivdin, Sefer B.
    Ozbay, Ekmel
    [J]. SURFACE AND INTERFACE ANALYSIS, 2022, 54 (05) : 576 - 583
  • [27] Influence of threading dislocations on the near-bandedge photoluminescence of wurtzite GaN thin films on SiC substrate
    Qiu, XG
    Segawa, Y
    Xue, QK
    Xue, QZ
    Sakurai, T
    [J]. APPLIED PHYSICS LETTERS, 2000, 77 (09) : 1316 - 1318
  • [28] Richardson's constant in inhomogeneous silicon carbide Schottky contacts
    Roccaforte, F
    La Via, F
    Raineri, V
    Pierobon, R
    Zanoni, E
    [J]. JOURNAL OF APPLIED PHYSICS, 2003, 93 (11) : 9137 - 9144
  • [29] Physics and technology of gallium nitride materials for power electronics
    Roccaforte, Fabrizio
    Fiorenza, Patrick
    Lo Nigro, Raffaella
    Giannazzo, Filippo
    Greco, Giuseppe
    [J]. RIVISTA DEL NUOVO CIMENTO, 2018, 41 (12): : 625 - 681
  • [30] Sze S. M., 2007, Physics of Semiconductor Devices, V3rd, DOI DOI 10.1002/0470068329