Evaluation of soft x-ray multilayer optics using synchrotron radiation

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作者：
Hatano, Tadashi
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来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2014年 / 80卷 / 06期
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D O I：
10.2493/jjspe.80.524
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页码：524 / 527
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