ADVANCED CHARACTERIZATION OF MATERIALS USING ATOM PROBE TOMOGRAPHY

被引：0
作者：
Garcia J.M. [1 ]
Chiaramonti A.N. [1 ]
机构：
[1] National Institute of Standards and Technology, Applied Chemicals and Materials Division, Boulder, CO
来源：
Electronic Device Failure Analysis | 2024年 / 26卷 / 01期
关键词：
atom probe tomography; electronic devices;
D O I：
10.31399/ASM.EDFA.2024-1.P014
中图分类号：
学科分类号：
摘要：
New materials integration and improved design can be promoted by using atom probe tomography (APT) as an analysis technique. This article provides an overview of APT principles and setups and provides diverse examples that focus on its use to characterize electronic devices. © ASM International®.
引用
收藏
页码：14 / 21
页数：7
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