High-mobility transparent conducting IMO thin films grown by reactive electron beam vapor deposition

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Chen, Xin-Liang [1 ]
Han, Dong-Gang [1 ]
Sun, Jian [1 ]
Zhao, Ying [1 ]
Geng, Xin-Hua [1 ]
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[1] Institute of Photo-electronic Thin Film Devices and Technology, Tianjin Key laboratory of Photo-electronic Thin Film Devices and Technology, Nankai University, Tianjin 300071, China
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页码:1599 / 1601
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