Preparation and piezoelectric properties analysis of ZnO films for film bulk acoustic resonator

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[1] [1,Su, Lin
[2] 1,Yang, Bao-He
[3] 1,Wang, Fang
[4] Li, Cui-Ping
[5] Zhu, Yu-Qing
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Prof. (bhyang@tjut.edu.cn) | 1600年 / Board of Optronics Lasers, No. 47 Yang-Liu-Qing Ying-Jian Road, Tian-Jin City, 300380, China卷 / 24期
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