Kelvin probe force microscopy study on operating In-Sn-O-channel ferroelectric-gate thin-film transistors

Surface potentials of an operating In-Sn-O channel ferroelectric-gate transistor (FGT) were mapped by Kelvin probe force microscopy. We clearly observed a gradual transition within the channel from linear potential profile to superlinear ones when drain voltage approaches and overcomes gate voltage, which is related to the physics of electronic transport under field-effect doping. The dependence of field-effect mobility on gate-bias and lateral field, as well as the effect of source/drain electrode materials on transport properties, was also elucidated. This study provides useful information for optimizing the FGT performance and for understanding its underlying physics. © 2014 AIP Publishing LLC.