Experimental study of the effect of hydrodynamic coupling of micro-cantilever array on the dynamic response of micro-cantilever

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Institute of NanoEngineering and MicroSystems, National Tsing Hua University, No. 101, Section 2, Kuang-Fu Road, Hsinchu, Taiwan [1 ]
不详 [2 ]
不详 [3 ]
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Sens Actuators A Phys | / 1卷 / 79-85期
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摘要：
Dynamic response
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