Microstructure and optical characterization of magnetron sputtered NbN thin films

被引：0
|
作者：
Du, Xin-Kang [1 ,2 ]
Wang, Tian-Min [1 ]
Wang, Cong [1 ]
Chen, Bu-Liang [3 ]
Zhou, Long [1 ]
机构：
[1] School of Science, Beijing University of Aeronautics and Astronautics, Beijing 100083, China
[2] Mechanical Engineering College, Shijiazhuang 050003, China
[3] Academy of Space Technology, Beijing 100029, China
来源：
Chinese Journal of Aeronautics | 2007年 / 20卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：140 / 144
相关论文
共 50 条
  • [41] DC REACTIVE MAGNETRON SPUTTERED NBN THIN-FILMS PREPARED WITH AND WITHOUT HOLLOW-CATHODE ENHANCEMENT
    DAWSONELLI, DF
    FUNG, CA
    NORDMAN, JE
    IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (02) : 1592 - 1595
  • [42] Structural and Optical Properties of Magnetron-Sputtered Chromium Oxynitride Thin Films
    Khalil, Maria
    Bashir, Aneeqa
    Khalil, Umara
    Ullah, Farman
    Ramay, Shahid M.
    Saleem, Murtaza
    ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, 2024, 13 (08)
  • [43] Nanostructural Features and Optical Performance of RF Magnetron Sputtered ZnO Thin Films
    Srivastava, A. K.
    Praveen
    Arora, M.
    Gupta, S. K.
    Chakraborty, B. R.
    Chandra, S.
    Toyoda, S.
    Bahadur, H.
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2010, 26 (11) : 986 - 990
  • [44] Study of Structure and Optical Properties of Magnetron Sputtered ZnS Thin Films by Annealing
    Chen, Ruifang
    Yu, Jie
    Hua, Yinqun
    Xu, Ruili
    Liu, Haixia
    MECHANICAL AND ELECTRONICS ENGINEERING III, PTS 1-5, 2012, 130-134 : 1379 - +
  • [45] MAGNETRON SPUTTERED THIN FILMS ON STRUCTURAL STEELS
    Hudakova, Maria
    Bosansky, Miroslav
    Jurci, Peter
    Vanya, Attila
    Bohovicova, Jana
    METAL 2011: 20TH ANNIVERSARY INTERNATIONAL CONFERENCE ON METALLURGY AND MATERIALS, 2011, : 660 - 665
  • [46] Preparation of thermosensitive magnetron sputtered thin films
    Beensh-Marchwicka, G
    Prociów, E
    Posadowski, W
    VACUUM, 1999, 53 (1-2) : 47 - 52
  • [47] Optical and electrical properties of RF magnetron sputtered ZnO:Al thin films
    Dimova-Malinovska, D
    Tzenov, N
    Tzolov, M
    Vassilev, L
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1998, 52 (01): : 59 - 62
  • [48] Microstructure of Al-containing magnetron sputtered TiB2 thin films
    Stueber, M.
    Riedl, H.
    Wojcik, T.
    Ulrich, S.
    Leiste, H.
    Mayrhofer, P. H.
    THIN SOLID FILMS, 2019, 688
  • [49] Nanostructural Features and Optical Performance of RF Magnetron Sputtered ZnO Thin Films
    A.K.Srivastava
    Praveen
    M.Arora
    S.K.Gupta
    B.R.Chakraborty
    S.Chandra
    S.Toyoda
    H.Bahadur
    JournalofMaterialsScience&Technology, 2010, 26 (11) : 986 - 990
  • [50] Control of structure in magnetron sputtered thin films
    Poláková, H
    Kubásek, M
    Cerstvy, R
    Musil, J
    SURFACE & COATINGS TECHNOLOGY, 2001, 142 : 201 - 205
12345