Microstructure and optical characterization of magnetron sputtered NbN thin films

被引：0
|
作者：
Du, Xin-Kang [1 ,2 ]
Wang, Tian-Min [1 ]
Wang, Cong [1 ]
Chen, Bu-Liang [3 ]
Zhou, Long [1 ]
机构：
[1] School of Science, Beijing University of Aeronautics and Astronautics, Beijing 100083, China
[2] Mechanical Engineering College, Shijiazhuang 050003, China
[3] Academy of Space Technology, Beijing 100029, China
来源：
Chinese Journal of Aeronautics | 2007年 / 20卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：140 / 144
相关论文
共 50 条
  • [21] ELLIPSOMETRIC AND OPTICAL REFLECTIVITY STUDIES OF REACTIVELY SPUTTERED NBN THIN-FILMS
    TANABE, K
    ASANO, H
    KATOH, Y
    MICHIKAMI, O
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (05) : 1733 - 1739
  • [22] Optical Characterization of rf-Magnetron Sputtered Nanostructured SnO2 Thin Films
    Khan, Abdul Faheem
    Mehmood, Mazhar
    Rana, A. M.
    Bhatti, M. T.
    Mahmood, A.
    CHINESE PHYSICS LETTERS, 2009, 26 (07)
  • [23] Optical characterization of magnetron sputtered p-type ZnO thin films codoped with Ga and As
    Park, Jang-Ho
    Seo, Ho-Yeon
    Jeong, Sang-Hun
    Lee, Byung-Teak
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2012, 209 (02): : 294 - 296
  • [24] MAGNETRON SPUTTERED THIN TUNGSTEN FILMS
    KOSSOWSKY, R
    BOURG, H
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C286 - C286
  • [25] Optical properties of magnetron sputtered nanocrystalline gold nitride thin films
    Shankernath, V
    Naidu, Lakshun K.
    Krishna, Ghanashyam M.
    Padmanabhan, K. A.
    MATERIALS RESEARCH EXPRESS, 2019, 6 (09)
  • [26] Structure and optical properties of aSiAl and aSiAlHx magnetron sputtered thin films
    Thogersen, Annett
    Stange, Marit
    Jensen, Ingvild J. T.
    Royset, Arne
    Ulyashin, Alexander
    Diplas, Spyros
    APL MATERIALS, 2016, 4 (03):
  • [27] NBN THIN-FILMS REACTIVELY SPUTTERED WITH A HIGH-FIELD DIRECT-CURRENT MAGNETRON
    DEEN, MJ
    LANDHEER, D
    WADE, JD
    SPROULE, GI
    DENHOFF, MD
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (04): : 2299 - 2303
  • [28] Effect of Zr incorporation on microstructure and properties of magnetron sputtered RuZr thin films
    Meng, Yu
    Song, Zhongxiao
    Li, Yanhuai
    Hu, Wei
    VACUUM, 2020, 179
  • [29] Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films
    Du, Shiwen
    Li, Yongtang
    ADVANCES IN MATERIALS SCIENCE AND ENGINEERING, 2015, 2015
  • [30] Characterization of Magnetron Sputtered BiTe-Based Thermoelectric Thin Films
    Zhang, Zhenxue
    Gurtaran, Mikdat
    Li, Xiaoying
    Un, Hio-Ieng
    Qin, Yi
    Dong, Hanshan
    NANOMATERIALS, 2023, 13 (01)
12345