Microstructure and optical characterization of magnetron sputtered NbN thin films

被引：0
|
作者：
Du, Xin-Kang [1 ,2 ]
Wang, Tian-Min [1 ]
Wang, Cong [1 ]
Chen, Bu-Liang [3 ]
Zhou, Long [1 ]
机构：
[1] School of Science, Beijing University of Aeronautics and Astronautics, Beijing 100083, China
[2] Mechanical Engineering College, Shijiazhuang 050003, China
[3] Academy of Space Technology, Beijing 100029, China
来源：
Chinese Journal of Aeronautics | 2007年 / 20卷 / 02期
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摘要：
Journal article (JA)
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页码：140 / 144
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