The effect of tungsten trioxide thin films at ferroelectric-electrode boundaries on fatigue behaviour

被引：0
|
作者：
Baxter, Paul [1 ]
Bowman, Robert M. [1 ]
Gregg, J. Marty [1 ]
机构：
[1] Centre for Nanostructured Media, IRCEP, Queen's University Belfast, Belfast BT7 INN, United Kingdom
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 5 PART 1期
关键词：
A conventional thin film capacitor heterostructure; consisting of sol-gel deposited lead zirconium titanate (PZT) layers with sputtered platinum top and bottom electrodes; was subjected to fatiguing pulses at a variety of frequencies. The fatigue characteristics were compared to those of a similarly processed capacitor in which a -20 nm tungsten trioxide layer had been deposited; using pulsed laser deposition; between the ferroelectric and upper electrode. The expectation was that; because of its ability to accommodate considerable oxygen non-stoichiometry; tungsten trioxide (WO3) might act as an efficient sink for any oxygen vacancies flushed to the electrode-ferroelectric boundary layer during repetitive switching; and hence would improve the fatigue characteristics of the thin film capacitor. However; it was found that; in general; the addition of tungsten trioxide actually increases the rate of fatigue. It appears that any potential benefit from the WO3; in terms of absorbing oxygen vacancies; is far outweighed by it causing dramatically increased charge injection in the system; ©2008 The Japan Society of Applied Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
页码：3552 / 3555
相关论文
共 50 条
  • [41] Preparation and characterization of tungsten trioxide (WO3) thin films
    Raveendran, Lavanya
    Gandhimathynathan, Saroja
    Veerapandy, Vasu
    ADVANCES IN NANOSCIENCE AND NANOTECHNOLOGY, 2013, 678 : 32 - 36
  • [42] 2 WAYS FOR COLORATION OF AMORPHOUS TUNGSTEN TRIOXIDE THIN-FILMS
    DENEUVILLE, A
    GERARD, P
    CHAKRAVERTY, BK
    JOURNAL OF ELECTRONIC MATERIALS, 1977, 6 (06) : 747 - 748
  • [43] EFFECT OF THIN ANODIC OXIDE FILMS ON FATIGUE BEHAVIOUR OF AN ALUMINIUM ALLOY
    EELES, EG
    JOURNAL OF THE INSTITUTE OF METALS, 1967, 95 : 156 - &
  • [44] Characterization of MOCVD Pt electrode for ferroelectric thin films
    Lee, JM
    Hwang, CS
    Kim, HJ
    INTEGRATED FERROELECTRICS, 1996, 13 (1-3) : 371 - 378
  • [45] Characterization of MOCVD Pt electrode for ferroelectric thin films
    Seoul Natl Univ, Seoul, Korea, Republic of
    Integr Ferroelectr, 1-3 (79-86):
  • [46] Electrode dependence of polydomain stability in ferroelectric thin films
    Misirlioglu, I. B.
    Pintilie, L.
    SCRIPTA MATERIALIA, 2022, 213
  • [47] Charge injection and polarization fatigue in ferroelectric thin films
    Jiang, A. Q.
    Lin, Y. Y.
    Tang, T. A.
    JOURNAL OF APPLIED PHYSICS, 2007, 102 (07)
  • [48] Polarization fatigue in ferroelectric thin films and related materials
    Lou, X. J.
    JOURNAL OF APPLIED PHYSICS, 2009, 105 (02)
  • [49] Fatigue properties of oriented PZT ferroelectric thin films
    Le Rhun, G
    Poullain, G
    Bouregba, R
    Leclerc, G
    JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2005, 25 (12) : 2281 - 2284
  • [50] Temperature dependent fatigue in ferroelectric PZT thin films
    Paton, EN
    Mansour, SA
    Bement, A
    ISAF '96 - PROCEEDINGS OF THE TENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 1996, : 467 - 470
12345