Effect of substrate temperature on properties of TiN coatings deposited by arc ion plating

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作者：
机构：
[1] Zhang, Hao
[2] Shang, Jin
[3] Zhang, Jie-Jun
[4] Ma, Jin-Jun
[5] Xu, Xiang-Min
[6] Duo, Shu-Wang
来源：
Duo, Shu-Wang | 1600年 / Northeast University卷 / 35期
关键词：
Coatings - Titanium nitride - Ion implantation - Phase structure;
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摘要：
TiN coatings were deposited by arc ion plating (AIP) technic to study the influence of substrate temperatures on the surface morphologies, phase components and mechanical properties of TiN coatings. The results indicated that the deposited TiN coatings were golden. The surface morphology and phase structure are not related with substrate temperature. There were lots of nitrogen particles with different sizes on the coating surface, the phases in coatings were the mixture of Ti, Ti2N and TiN. With the increase of substrate temperature, the bonding strength between coating and substrate increases first, then decreases. The coating hardness increases with the increasing temperature, but increases slowly after 300℃. TiN coatings have the superior mechanical properties at 300℃. ©, 2014, Northeastern University. All right reserved.
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