Application of 3-D transmission electron microscopy in semiconductor device analysis

被引：0

作者：

Wang, Nathan ^{[1
]}

Li, Susan ^{[1
]}

机构：

[1] Spansion Inc.

来源：

Electronic Device Failure Analysis | 2008年 / 10卷 / 01期

关键词：

Semiconductor devices;

D O I：

暂无

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学科分类号：

摘要：

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页码：12 / 16

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