Vertical nano-microring resonators with enhanced tolerance to fabrication misalignments

被引：0

作者：

Le Z. ^{[1
]}

Li R. ^{[1
]}

Hu J. ^{[1
]}

Dong W. ^{[2
]}

机构：

[1] College of Sciences, Zhejiang University of Technology, Hangzhou

[2] College of Biological and Environmental Engineering, Zhejiang University of Technology, Hangzhou

来源：

Guangxue Xuebao/Acta Optica Sinica | 2011年 / 31卷 / 12期

关键词：

Coupling mode theory; Fabrication tolerance; Finite-different time-domain method; Integrated optics; Microring resonator; Vertical coupling;

D O I：

10.3788/AOS201131.1213001

中图分类号：

学科分类号：

摘要：

Microring resonators are key components in nowadays photonic integrated circuits. A vertical microring resonator with enhanced tolerance to fabrication misalignments is introduced. Both straight and microring waveguides are with relatively high refractive-index difference between the core and cladding, therefore the vertical microring resonator is compact and confines the power efficiently. Based on coupling mode theory, the coupling coefficient is derived as a function of the coupling layer thickness (d) and the transverse offset (Δ) between the straight and microring waveguides. The analytic solutions are used to confine the range of three-dimensional finite-different time-domain (3D-FDTD) simulations for their efficiency. In addition, the tolerance of d and Δ is studied by taking consideration of actual fabrication technology for the vertical nano-microring resonator. The analytic solutions and simulation results show that when d=30 nm, the vertical microring resonator has a large coupling coefficient even Δ is varied from 130 to 265 nm. It is verified that the vertical nano-microring resonator has enhanced tolerance to fabrication misalignments.

引用

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