3D thermoshrink micropillar array metasurface biochemical sensor at the terahertz frequency

被引：0
作者：
Zhang, Junhao [1 ,2 ]
Bian, Xiaomeng [1 ,2 ]
Xing, Wenqiang [1 ,2 ]
Bi, Hao [1 ,2 ]
Liang, Misheng [1 ,2 ]
You, Rui [1 ,2 ]
机构：
[1] Beijing Informat Sci & Technol Univ, Lab Intelligent Microsyst, Beijing 100192, Peoples R China
[2] Beijing Informat Sci & Technol Univ, Sch Instrument Sci & Optoelect Engn, Beijing 100192, Peoples R China
来源：
OPTICS EXPRESS | 2024年 / 32卷 / 26期
基金：
中国国家自然科学基金;
关键词：
Laser materials processing - Laser produced plasmas;
D O I：
10.1364/OE.546552
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This study presents what we believe to be a novel method using a laser-induced heat-shrinkable polymer to leverage the rapid processing capabilities of femtosecond-laserprepared microstructures and accelerate the fabrication of three-dimensional optical metasurface biochemical sensors. Arrays of micropillar unit structures, each 220 mu m in height, were successfully fabricated by modulating laser-induced contraction. These arrays exhibited exceptional performance in fingerprint spectral coupling and biochemical sensing, achieving detection limits of 6 nM for lactose and 8 pg/mL for the SARS-CoV-2 S protein. The metasurface sensors demonstrated high sensitivities and low detection limits, while the simplified manufacturing process further enhanced device performance, highlighting the method's potential for advanced biochemical sensing applications. (c) 2024 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
引用
收藏
页码：47248 / 47258
页数：11
相关论文
共 44 条
[1]   The Detection of Chemical Materials with a Metamaterial-Based Sensor Incorporating Oval Wing Resonators [J].
Abdulkarim, Yadgar I. ;
Deng, Lianwen ;
Karaaslan, Muharrem ;
Dalgac, Sekip ;
Mahmud, Rashad Hassan ;
Alkurt, Fatih Ozkan ;
Muhammadsharif, Fahmi F. ;
Awl, Halgurd N. ;
Huang, Shengxiang ;
Luo, Heng .
ELECTRONICS, 2020, 9 (05)
[2]   A magnetic control enrichment technique combined with terahertz metamaterial biosensor for detecting SARS-CoV-2 spike protein [J].
Bi, Hao ;
You, Rui ;
Bian, Xiaomeng ;
Li, Peng ;
Zhao, Xiaoguang ;
You, Zheng .
BIOSENSORS & BIOELECTRONICS, 2024, 243
[3]   All-Dielectric Metamaterial Fabrication Techniques [J].
Bi, Ke ;
Wang, Qingmin ;
Xu, Jianchun ;
Chen, Lihao ;
Lan, Chuwen ;
Lei, Ming .
ADVANCED OPTICAL MATERIALS, 2021, 9 (01)
[4]   Research on a high-sensitivity asymmetric metamaterial structure and its application as microwave sensor [J].
Cao, Yunhao ;
Ruan, Cunjun ;
Chen, Kanglong ;
Zhang, Xingyun .
SCIENTIFIC REPORTS, 2022, 12 (01)
[5]   Fabrication of Hierarchical Microstructures via Laser-Induced Shrinkage of Shape Memory Polymers for Flexible Pressure Sensing [J].
Chen, Rui ;
Zhang, Chen ;
Xiao, Chiqian ;
Zhao, Tianchang ;
Luo, Tao ;
Zhou, Wei .
ACS APPLIED MATERIALS & INTERFACES, 2024, 16 (34) :45732-45744
[6]   Quasi-BIC supported flexible terahertz metamaterial sensor for curvature measurement [J].
Dai, Zijie ;
Yan, Can ;
Ye, Yunxia ;
Chen, Mingyang ;
Liang, Ying ;
Li, Jitao .
OPTICS EXPRESS, 2024, 32 (20) :35030-35038
[7]   Scalable Nanoimprint Lithography Process for Manufacturing Visible Metasurfaces Composed of High Aspect Ratio TiO2 Meta-Atoms [J].
Einck, Vincent J. ;
Torfeh, Mahsa ;
McClung, Andrew ;
Jung, Dae Eon ;
Mansouree, Mahdad ;
Arbabi, Amir ;
Watkins, James J. .
ACS PHOTONICS, 2021, 8 (08) :2400-2409
[8]   A Flexible Terahertz Metamaterial Biosensor for Cancer Cell Growth and Migration Detection [J].
Fang, Weihao ;
Lv, Xiaoqing ;
Ma, Zhengtai ;
Liu, Jian ;
Pei, Weihua ;
Geng, Zhaoxin .
MICROMACHINES, 2022, 13 (04)
[9]   Photonic Metamaterial Absorbers: Morphology Engineering and Interdisciplinary Applications [J].
Feng, Lei ;
Huo, Pengcheng ;
Liang, Yuzhang ;
Xu, Ting .
ADVANCED MATERIALS, 2020, 32 (27)
[10]   Complex k band diagrams of 3D metamaterial/photonic crystals [J].
Fietz, Chris ;
Urzhumov, Yaroslav ;
Shvets, Gennady .
OPTICS EXPRESS, 2011, 19 (20) :19027-19041
12345