Fully digital smart temperature sensor with quartz tuning fork resonator

被引:0
作者
Xu, Jun [1 ,2 ]
You, Bo [1 ]
Li, Xin [3 ]
Ma, Jing [1 ]
机构
[1] School of Automation, Harbin University of Science and Technology, Harbin 150080, China
[2] School of Measurement-control Technology and Communication Engineering, Harbin University of Science and Technology, Harbin 150080, China
[3] Computer Center, Harbin University of Science and Technology, Harbin 150080, China
来源
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2009年 / 17卷 / 06期
关键词
Piezoelectricity - CMOS integrated circuits - Differential equations - Integrated circuit design - Crystal resonators - Crystallography - Tuning - Vibration analysis - Field programmable gate arrays (FPGA) - Temperature sensors - Metals - MOS devices - Nanowires - Oxide semiconductors;
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页码:1453 / 1459
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