A radio-frequency nonequilibrium atmospheric pressure plasma operating with argon and oxygen

被引：0
|
作者：
Moravej, M. [1 ]
Yang, X. [1 ]
Hicks, R.F. [1 ]
Penelon, J. [2 ]
Babayan, S.E. [2 ]
机构：
[1] Chemical Engineering Department, University of California, Los Angeles, CA 90095
[2] Surfx Technologies LLC, 3617 Hayden Avenue, Culver City, CA 90232
来源：
Journal of Applied Physics | 2006年 / 99卷 / 09期
关键词：
A capacitively coupled; atmospheric pressure plasma has been developed that produces a high concentration of reactive species at a gas temperature below 300 °C. The concentration of ground-state oxygen atoms produced by the discharge was measured by NO titration; and found to equal 1.2 vol %; or; 1.2±0.4×; 1017; cm-3; using 6.0 vol % O2 in argon at 150 W cm3. The ozone concentration determined at the same conditions was 4.3±0.5× 1014 cm-3. A model of the gas phase reactions was developed and yielded O atom and O3 concentrations in agreement with experiment. This plasma source etched Kapton&reg at 5.0 μms at 280 °C and an electrode-to-sample spacing of 1.5 cm. This fast etch rate is attributed to the high O atom flux generated by the plasma source. © 2006 American Institute of Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [41] PECULIARITIES OF GLOW MODES OF ARGON ATMOSPHERIC PRESSURE RADIO-FREQUENCY CAPACITIVE DISCHARGE WITH ISOLATED ELECTRODES
    Bazhenov, V. Vu.
    Tsiolko, V. V.
    Piun, V. M.
    Chaplinskiy, R. Yu.
    Kuzmichev, A. I.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2013, (04): : 171 - 175
  • [42] Characteristics of atmospheric-pressure, radio-frequency glow discharges operated with argon added ethanol
    Sun, Wen-Ting
    Li, Guo
    Li, He-Ping
    Bao, Cheng-Yu
    Wang, Hua-Bo
    Zeng, Shi
    Gao, Xing
    Luo, Hui-Ying
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (12)
  • [43] Radio-Frequency Oxygen Plasma as a Sterilization Source
    Bol'shakov, A.A., 1600, American Inst. Aeronautics and Astronautics Inc. (42):
  • [44] Radio-frequency oxygen plasma as a sterilization source
    Bol'shakov, AA
    Cruden, BA
    Mogul, R
    Rao, MVVS
    Sharma, SP
    Khare, BN
    Meyyappan, M
    AIAA JOURNAL, 2004, 42 (04) : 823 - 832
  • [45] Operating a radio-frequency plasma source on water vapor
    Nguyen, Sonca V. T.
    Foster, John E.
    Gallimore, Alec D.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (08):
  • [46] Radio-frequency dielectric-barrier glow discharges in atmospheric argon
    Shi, J. J.
    Kong, M. G.
    APPLIED PHYSICS LETTERS, 2007, 90 (11)
  • [47] Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge
    Li, Shou-Zhe
    Lim, Jin-Pyo
    Kang, Jung G.
    Uhm, Han S.
    PHYSICS OF PLASMAS, 2006, 13 (09)
  • [48] Characteristics of kilohertz-ignited, radio-frequency atmospheric-pressure dielectric barrier discharges in argon
    Le, Pei-Si
    Li, Guo
    Wang, Sen
    Li, He-Ping
    Bao, Cheng-Yu
    APPLIED PHYSICS LETTERS, 2009, 95 (20)
  • [49] Glow discharges observed in capacitive radio-frequency atmospheric-pressure plasma jets
    Laimer, Johann
    Stoeri, Herbert
    PLASMA PROCESSES AND POLYMERS, 2006, 3 (08) : 573 - 586
  • [50] Spatio-temporally resolved electron temperature in argon radio-frequency capacitive discharge at atmospheric pressure
    Park, Sanghoo
    Choe, Wonho
    Moon, Se Youn
    Yoo, Suk Jae
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2015, 24 (03):
12345