A radio-frequency nonequilibrium atmospheric pressure plasma operating with argon and oxygen

被引：0
|
作者：
Moravej, M. [1 ]
Yang, X. [1 ]
Hicks, R.F. [1 ]
Penelon, J. [2 ]
Babayan, S.E. [2 ]
机构：
[1] Chemical Engineering Department, University of California, Los Angeles, CA 90095
[2] Surfx Technologies LLC, 3617 Hayden Avenue, Culver City, CA 90232
来源：
Journal of Applied Physics | 2006年 / 99卷 / 09期
关键词：
A capacitively coupled; atmospheric pressure plasma has been developed that produces a high concentration of reactive species at a gas temperature below 300 °C. The concentration of ground-state oxygen atoms produced by the discharge was measured by NO titration; and found to equal 1.2 vol %; or; 1.2±0.4×; 1017; cm-3; using 6.0 vol % O2 in argon at 150 W cm3. The ozone concentration determined at the same conditions was 4.3±0.5× 1014 cm-3. A model of the gas phase reactions was developed and yielded O atom and O3 concentrations in agreement with experiment. This plasma source etched Kapton&reg at 5.0 μms at 280 °C and an electrode-to-sample spacing of 1.5 cm. This fast etch rate is attributed to the high O atom flux generated by the plasma source. © 2006 American Institute of Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [1] A radio-frequency nonequilibrium atmospheric pressure plasma operating with argon and oxygen
    Moravej, M.
    Yang, X.
    Hicks, R. F.
    Penelon, J.
    Babayan, S. E.
    JOURNAL OF APPLIED PHYSICS, 2006, 99 (09)
  • [2] Properties of an atmospheric pressure radio-frequency argon and nitrogen plasma
    Moravej, M.
    Yang, X.
    Barankin, M.
    Penelon, J.
    Babayan, S. E.
    Hicks, R. F.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2006, 15 (02): : 204 - 210
  • [3] Influence of oxygen traces on an atmospheric-pressure radio-frequency capacitive argon plasma discharge
    Li, Shou-Zhe
    Wu, Qi
    Yan, Wen
    Wang, Dezhen
    Uhm, Han S.
    PHYSICS OF PLASMAS, 2011, 18 (10)
  • [4] On diagnostics of annular-shape radio-frequency plasma jet operating in argon in atmospheric conditions
    Sremacki, Ivana
    Jurov, Andrea
    Modic, Martina
    Cvelbar, Uros
    Wang, Lei
    Leys, Christophe
    Nikiforov, Anton
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2020, 29 (03):
  • [5] Control of radio-frequency atmospheric pressure argon plasma characteristics by helium gas mixing
    Moon, SY
    Han, JW
    Choe, W
    PHYSICS OF PLASMAS, 2006, 13 (01) : 1 - 4
  • [6] Simulation of Radio-Frequency Capacitive Discharge at Atmospheric Pressure in Argon
    Chebakova, V. Ju.
    UCHENYE ZAPISKI KAZANSKOGO UNIVERSITETA-SERIYA FIZIKO-MATEMATICHESKIE NAUKI, 2016, 158 (03): : 404 - 423
  • [7] Numerical study on characteristics of radio-frequency discharge at atmospheric pressure in argon with small admixtures of oxygen
    王一男
    刘悦
    Plasma Science and Technology, 2017, 19 (07) : 54 - 60
  • [8] Numerical study on characteristics of radio-frequency discharge at atmospheric pressure in argon with small admixtures of oxygen
    Wang, Yinan
    Liu, Yue
    PLASMA SCIENCE & TECHNOLOGY, 2017, 19 (07)
  • [9] Numerical study on characteristics of radio-frequency discharge at atmospheric pressure in argon with small admixtures of oxygen
    王一男
    刘悦
    Plasma Science and Technology, 2017, (07) : 54 - 60
  • [10] Comparison of an atmospheric pressure, radio-frequency discharge operating in the α and γ modes
    Yang, X
    Moravej, M
    Nowling, GR
    Babayan, SE
    Panelon, J
    Chang, JP
    Hicks, RF
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2005, 14 (02): : 314 - 320
12345