Optical characterization of CuInSe2 thin films grown by metal organic chemical vapor deposition

被引：0

作者：

Ko, Cheng-Hao ^{[1
,4
]}

Chen, Chang-Tai ^{[1
,4
]}

Yang, Ming-Der ^{[2
]}

Hu, Che-Hao ^{[2
]}

Liu, Yu-Kai ^{[2
]}

Wang, Jyh-Shyang ^{[2
]}

Shen, Ji-Lin ^{[2
]}

Yang, Tsun-Neng ^{[3
]}

Lan, Shan-Ming ^{[3
]}

Lin, Jian-Shian ^{[4
]}

机构：

[1] Department of Electrical Engineering, Yuan-Zi University, Chungli 320, Taiwan

[2] Physics Department, Chung Yuan Christian University, Chungli 320, Taiwan

[3] Institute of Nuclear Energy Research, P.O. Box 3-11, Lungtan 32500, Taiwan

[4] Advanced Manufacturing Core Technology Division, Mechanical and System Research Laboratories, Industrial Technology Research Institute, Chu-Tung 31040, Taiwan

来源：

Japanese Journal of Applied Physics | 2008年 / 47卷 / 9 PART 1期

关键词：

We studied the photoluminescence (PL) in CuInSe2 thin films grown by metal organic chemical vapor deposition (MOCVD) using a Cu precursor and two gases. By X-ray diffraction (XRD) and PL analysis; we found that the best quality of CuInSe2 thin films can be obtained when the deposition time of the trimethylindium (TMI) gas is 30 min. The improvement of the quality of CuInSe2 thin films after rapid thermal annealing (RTA) is evident from the full width at half maximum (FWHM) of PL. The FWHM of the PL peak is minimum when the RTA temperature is 500C. It is found the binding energy of the impurity level in CuInSe2 thin films increases after RTA; revealing that the thermal stability of CuInSe2 thin films is improved after RTA. © 2008 The Japan Society of Applied Physics;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：7044 / 7046

共 50 条

[21] Structural and optical analyses of AlxGa1-xN thin films grown by metal organic chemical vapor deposition
Kucukgok, Bahadir
Lu, Na
Ferguson, Ian T.
Wang, Shu Chang
Zhang, Xiong
Feng, Zhe Chuan
JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (02)
[22] Blueshift of optical band gap in ZnO thin films grown by metal-organic chemical-vapor deposition
Tan, ST
Chen, BJ
Sun, XW
Fan, WJ
Kwok, HS
Zhang, XH
Chua, SJ
JOURNAL OF APPLIED PHYSICS, 2005, 98 (01)
[23] Superconductivity and magnetism in FeSe thin films grown by metal-organic chemical vapor deposition
Li, L.
Yang, Z. R.
Sun, Y. P.
Zhang, J. Y.
Shen, D. Z.
Zhang, Y. H.
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2011, 24 (01):
[24] Deposition and Characterization of SnSe and CuInSe2 Thin Films by Thermal Evaporation Technique from Synthesized SnSe and CuInSe2 Sources
Sabli, Nordin
Talib, Zainal Abidin
Bin, Chang Chung
Yunus, Wan Mahmood Mat
Zainal, Zulkarnain
Hilal, Hikmat S.
Chyi, Josephine Liew Ying
Fujii, Masatoshi
SAINS MALAYSIANA, 2014, 43 (07): : 1061 - 1067
[25] OPTICAL-CONSTANTS OF ZNSIAS2 THIN-FILMS GROWN BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION
NASEEM, HA
BURTON, LC
ANDREWS, JE
THIN SOLID FILMS, 1985, 129 (1-2) : 49 - 54
[26] WS2 thin films by metal organic chemical vapor deposition
Chung, JW
Dai, ZR
Ohuchi, FS
JOURNAL OF CRYSTAL GROWTH, 1998, 186 (1-2) : 137 - 150
[27] Studies on optical characteristics of CuInSe2 thin films
Bhuiyan, Mohammad Arif Sobhan
Bhuiyan, Abdus Sobhan
Hossain, Ahmad
Mahmood, Zahid Hasan
OPEN ENGINEERING, 2013, 3 (02): : 170 - 173
[28] Characteristics of CuInSe2 thin films grown by the selenization method
Kim, SD
Kim, HJ
Adurodija, FO
Yoon, KH
Song, JS
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1999, 35 : S403 - S405
[29] Optical properties of polymeric thin films grown by chemical vapor deposition
Gaynor, JF
Desu, SB
JOURNAL OF MATERIALS RESEARCH, 1996, 11 (01) : 236 - 242
[30] DEPOSITION AND CHARACTERIZATION OF CUINSE2
CHOWLES, AG
NEETHLING, JH
VANNIEKERK, H
ENGELBRECHT, JAA
WATTERS, VJ
RENEWABLE ENERGY, 1995, 6 (5-6) : 613 - 618

← 1 2 3 4 5 →