Static and Dynamic Analysis of Thermal Cross-Talk in an Thermopile Detector Array for use in an Microspectrometer

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Faculty of EEMCS, Department for ME/EI, Delft University of Technology, Delft, Netherlands ^{[1
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Procedia Chem. | 1876年 / 1卷 / 1139-1142期

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This work has been supported in part by the Dutch technology foundation STW under grant DET.6667. Devices have been fabricated at the DIMES (Delft Institute of Microsystems and Nanoelectronics). The authors are indebted to W van der Vlist for his assistance in device fabrication and to Prof. P. M. Sarro for helpful discussions on the processing;

D O I：

September 6, 2009 - September 9, 2009

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