Effect of thermal processing on silver thin films of varying thickness deposited on zinc oxide and indium tin oxide

被引：0
|
作者：
Sivaramakrishnan, K. [1 ]
Ngo, A.T. [1 ]
Iyer, S. [2 ]
Alford, T.L. [1 ]
机构：
[1] School of Materials, Flexible Display Center, Arizona State University, Tempe, AZ 85287, United States
[2] Department of Electrical and Computer Engineering, North Carolina Agricultural and Technical State University, Greensboro, NC 27411, United States
来源：
Journal of Applied Physics | 2009年 / 105卷 / 06期
关键词：
Silver films of varying thicknesses (25; 45; and 60 nm) were deposited on indium tin oxide (ITO) on silicon and zinc oxide (ZnO) on silicon. The films were annealed in vacuum for 1 h at different temperatures (300-650 °C). Four-point-probe measurements were used to determine the resistivity of the films. All films showed an abrupt change in resistivity beyond an onset temperature that varied with thickness. Rutherford backscattering spectrometry measurements revealed agglomeration of the Ag films upon annealing as being responsible for the resistivity change. X-ray pole figure analysis determined that the annealed films took on a preferential 〈 111 〉 texturing; however; the degree of texturing was significantly higher in Ag/ZnO/Si than in Ag/ITO/Si samples. This observation was accounted for by interface energy minimization. Atomic force microscopy (AFM) measurements revealed an increasing surface roughness of the annealed films with temperature. The resistivity behavior was explained by the counterbalancing effects of increasing crystallinity and surface roughness. Average surface roughness obtained from the AFM measurements were also used to model the agglomeration of Ag based on Ostwald ripening theory. © 2009 American Institute of Physics;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [21] Thermal Conductivity of Amorphous Indium Zinc Oxide Thin Films
    Endoh, Ryo
    Hirano, Takayuki
    Takeda, Masaaki
    Oishi, Manabu
    Oka, Nobuto
    Shigesato, Yuzo
    TRANSPARENT CONDUCTING OXIDES AND APPLICATIONS, 2011, 1315 : 125 - 130
  • [22] Effect of thickness on optoelectrical properties of Nb-doped indium tin oxide thin films deposited by RF magnetron sputtering
    Li S.-N.
    Ma R.-X.
    Ma C.-H.
    Li D.-R.
    Xiao Y.-Q.
    He L.-W.
    Zhu H.-M.
    Optoelectronics Letters, 2013, 9 (3) : 198 - 200
  • [23] Femtosecond laser processing of indium-tin-oxide thin films
    Cheng, C. W.
    Lee, I. M.
    Chen, J. S.
    OPTICS AND LASERS IN ENGINEERING, 2015, 69 : 1 - 6
  • [24] Textured indium tin oxide thin films by chemical solution deposition and rapid thermal processing
    Mottern, Matthew L.
    Tyholdt, Frode
    Ulyashin, Alexander
    van Helvoort, Antonius T. J.
    Verweij, Henk
    Bredesen, Rune
    THIN SOLID FILMS, 2007, 515 (7-8) : 3918 - 3926
  • [25] Thermal degradation behavior of indium tin oxide thin films deposited by radio frequency magnetron sputtering
    Kim, YN
    Shin, HG
    Song, JK
    Cho, DH
    Lee, HS
    Jung, YG
    JOURNAL OF MATERIALS RESEARCH, 2005, 20 (06) : 1574 - 1579
  • [26] Early stage growth structure of indium tin oxide thin films deposited by reactive thermal evaporation
    Amaral, A
    Brogueira, P
    de Carvalho, CN
    Lavareda, G
    SURFACE & COATINGS TECHNOLOGY, 2000, 125 (1-3): : 151 - 156
  • [27] Thermal degradation behavior of indium tin oxide thin films deposited by radio frequency magnetron sputtering
    Yong-Nam Kim
    Hyun-Gyoo Shin
    Jun-Kwang Song
    Dae-Hyoung Cho
    Hee-Soo Lee
    Yeon-Gil Jung
    Journal of Materials Research, 2005, 20 : 1574 - 1579
  • [28] Growth and characterization of indium tin oxide thin films deposited on PET substrates
    Lee, Jaehyeong
    Jung, Hakkee
    Lee, Jongin
    Lim, Donggun
    Yang, Keajoon
    Yi, Junsin
    Song, Woo-Chang
    THIN SOLID FILMS, 2008, 516 (07) : 1634 - 1639
  • [29] SIMULATION PROPERTIES OF THIN FILMS OF INDIUM TIN OXIDE DEPOSITED ON POLYMER SUBSTRATES
    Eisa, M. H.
    Alfedeel, A. H. A.
    DIGEST JOURNAL OF NANOMATERIALS AND BIOSTRUCTURES, 2020, 15 (01) : 59 - 65
  • [30] Structural, morphological, electrical, and optical properties of silver thin films of varying thickness deposited on cupric oxide
    Hajakbari, Fatemeh
    Shafieinejad, Farzaneh
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (03)
12345