Inkjet printing of sustainable ZTO/AlOx thin film transistors

被引:0
作者
Moreira, Pedro Gabriel [1 ]
Martins, Rodrigo [1 ]
Carlos, Emanuel [1 ]
Branquinho, Rita [1 ]
机构
[1] Univ NOVA Lisboa UNL, Fac Ciencias & Tecnol FCT, CENIMAT Dept Ciencia Mat i3N, P-2829516 Caparica, Portugal
来源
FLEXIBLE AND PRINTED ELECTRONICS | 2024年 / 9卷 / 04期
基金
欧盟地平线“2020”;
关键词
zinc tin oxide; aluminum oxide; solution-based metal oxides; inkjet printing; combustion synthesis; OXIDE; TFT;
D O I
10.1088/2058-8585/ad96c7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Even though printed metal oxide thin film transistors (TFTs) have been a central topic of research in the past decade, the most notable results still require scarce elements such as gallium and indium, or high annealing temperatures (>= 400 degrees C) when using sustainable raw materials such as zinc and tin. In this work, safe, abundant and inexpensive materials such as zinc, tin and aluminum are explored to reach low-cost thin films and devices with both the semiconductor and dielectric layers deposited by inkjet printing and annealed at lower temperatures (300 degrees C). Alumina (AlOx) and zinc tin oxide (ZTO) inks containing a theoretical optimal V% of ethylene glycol were optimized for production of uniform and reproducible AlOx/ZTO thin film layers. Common ink parameters (such as the reverse Ohnesorge, capillary, Webber and Reynolds numbers) were evaluated and compared with relevant literature on inkjet drop formation mechanisms. Inks within theoretical optimal parameter values were printing optimized in terms of drops per inch, number of layers, UV substrate surface activation, print speed, and post- annealing. A high-quality dielectric of two alumina layers was printed, having a breakdown field above 2.93 +/- 0.33 MV cm(-1), and a dielectric constant of 7.74 +/- 0.73 at 1 kHz. TFTs of inkjet printed (IJP) ZTO/AlOx layers were produced with a maximum I-On/I-Off ratio of 10(3) and a saturation mobility of 2.2 cm(2) V-1 s(-1). This approach not only advances the field of printed electronics but also addresses concerns related to material scarcity, thermal budget, and production costs.
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页数:11
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