Capacitive pressure sensors based on microstructured polymer-derived SiCN ceramics for high-temperature applications

被引:0
|
作者
Ma, Chao [1 ,2 ]
Xiong, Chunyue [1 ]
Zhao, Rui [1 ]
Wang, Kang [1 ]
Yang, Mengmeng [1 ]
Liang, Yi [1 ]
Li, Mingliang [2 ]
Han, Daoyang [1 ]
Wang, Hailong [1 ]
Zhang, Rui [1 ]
Shao, Gang [1 ,3 ]
机构
[1] Zhengzhou Univ, Sch Mat Sci & Engn, Zhengzhou 450001, Henan, Peoples R China
[2] Zhengzhou Univ, Zhongyuan Crit Met Lab, Zhengzhou 450001, Henan, Peoples R China
[3] Zhengzhou Univ Zhengzhou, State Key Lab Struct Anal, Optimizat & CAE Software Ind Equipment, Zhengzhou 450002, Henan, Peoples R China
基金
中国国家自然科学基金; 中国博士后科学基金;
关键词
Polymer-derived ceramics (PDCs); Microstructure arrays; Capacitive pressure sensor; Sensitivity; High temperature environment; FABRICATION; CARBONITRIDE; VISCOSITY;
D O I
10.1016/j.jcis.2024.08.153
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Traditional silicon-based pressure sensors cannot meet demand of pressure information acquisition in high-temperature extreme environments due to their low sensitivity, limited detection temperature and complex processing. Herein, a capacitive pressure sensor is fabricated using polymer-derived SiCN ceramics with convex microstructures via a sample replication strategy. Its performance is measured at different pressures (0-800 kPa) from room temperature to 500 degrees C. The results show that the SiCN ceramic capacitive pressure sensor exhibits low hysteresis, good non-linearity of 0.26 %, outstanding repeatability and high sensitivity of 0.197 pF/MPa under room temperature. When the test temperature reaches 500 degrees C, the performance of the prepared capacitive pressure sensor has no degradation, keeping competent sensitivity of 0.214 pF/MPa and nonlinear error of 0.24 %. Therefore, benefitting from the preeminent high-temperature properties, e.g., excellent oxidation/corrosion resistance and thermal stability, SiCN ceramics capacitive pressure sensors have great potential in the application of high-temperature and harsh environments.
引用
收藏
页码:503 / 510
页数:8
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