RIE of SiO2 nanoparticles and its application in preparation of silicon nanopillar array

被引：0
|
作者：
Zhao, Yu [1 ]
Jiang, Xun [1 ]
Li, Cheng-Yao [2 ]
Wang, Wei [1 ,3 ]
Gao, Min [2 ]
Li, Zhi-Hong [1 ,3 ]
机构：
[1] Institute of Microelectronics, Peking University, Beijing 100871, China
[2] Key Laboratory for the Physics and Chemistry of Nanodevices of Ministry of Education, Beijing 100871, China
[3] National Key Laboratory of Nano/Micro Fabrication Technology, Beijing 100871, China
来源：
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering | 2009年 / 7卷 / 06期
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摘要：
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页码：515 / 518
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