Dynamic characteristics of a micro-mechanical-resonator with squeeze film damping

被引:0
|
作者
Zhang, Qi-Chang [1 ]
Zhou, Fan-Sen [1 ]
Wang, Wei [1 ]
机构
[1] Tianjin Municipal Key Laboratory of Nonlinear Dynamics and Chaos Control, School of Mechanical Engineering, Tianjin University, Tianjin,300072, China
来源
Zhendong yu Chongji/Journal of Vibration and Shock | 2015年 / 34卷 / 17期
关键词
Dynamics - Electrostatic actuators - Damping;
D O I
10.13465/j.cnki.jvs.2015.17.021
中图分类号
学科分类号
摘要
引用
收藏
页码:124 / 130
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