Miniaturization of micro EDM using electrostatic induction feeding method

被引：7
作者：
Kimori M.
Kunieda M.
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2010年 / 76卷 / 10期
关键词：
Electrostatic induction feeding; Micro EDM; Miniaturization; Relaxation pulse generator;
D O I：
10.2493/jjspe.76.1151
中图分类号：
学科分类号：
摘要：
This paper describes the limit of miniaturization of micro EDM using the electrostatic induction feeding method. In this method, it is possible to minimize the influence of the stray capacitance existent parallel to the working gap because the point of electric feeding can be located near the working gap. Hence, the minimum discharge energy is smaller than that of the relaxation pulse generator. As a result, the diameter of discharge craters of this method was 0.4μm, smaller than that of the relaxation pulse generator by 0.3p.m. Therefore, the minimum diameter of rods obtained using this method was 0.8μm, smaller than that of the relaxation pulse generator by 0.1 μm. Moreover, the success probability of fabrication of micro rods thinner than 2.0μm in diameter was two times higher than that of the relaxation pulse generator.
引用
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页码：1151 / 1155
页数：4
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