Simulation and test ultra-precision diamond machining of microstructure

被引：0
作者：
Zhao, Qingliang [1 ]
Wang, Yilong [1 ]
Yu, Guang [1 ]
Yang, Yuanhua [1 ]
机构：
[1] School of Mechatronics Engineering, Harbin Institute of Technology
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2009年 / 45卷 / 12期
关键词：
Machining simulation; Microstructure surface; Ultra-precision diamond machining;
D O I：
10.3901/JME.2009.12.173
中图分类号：
学科分类号：
摘要：
In order to solve the problem of difficult prediction of the machined surface quality and the effects of machining conditions on cutting process in an economical and flexible way in ultra-precision diamond machining of microstructured surface. A dynamic simulation model for ultra-precision diamond machining of sine-wave microstructure is established. By using this model, one can not only estimate the surface topography and surface quality but also simulate the effect of cutting conditions such as the feed rate and spindle speed on the surface quality. The rerification test of the ultra-precision diamond machining of sine-wave microstructure is conducted, and a typical sine-wave microstructure with a form accuracy of 0.65μm and surface roughness of 45 nm is manufactured. Test results show that the establishment of the dynamic simulation model has important guide significance to the machining of microstructures. © 2009 Journal of Mechanical Engineering.
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页码：173 / 181
页数：8
相关论文
共 17 条
  • [11] Thomas A., Michele D., Miller H., Et al., Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces, Precision Engineering, 13, 4, pp. 243-250, (1991)
  • [12] Weck M., Fritz K., Oezmeral H., Manufacturing and applications of nonrotationally symmetric optics, Proceedings of International Society for Optical Engineering. Fabrication II Division. Symposium on Optical Fabrication and Testing, 3739, pp. 94-107, (1999)
  • [13] Gao W., Araki T., Kiyono S., Et al., Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder, Precision Engineering, 27, 3, pp. 289-298, (2003)
  • [14] Matthew J., Robin L., Fabrication and metrology of micro-scale sinusoidal surfaces in polymer workpiece materials, American Society for Precision Engineering. 2004 Annual Meeting, pp. 1-6, (2004)
  • [15] Lee W.B., To S., Cheung C.F., Ultra-precision machining of optical mirostructure, Nanotechnology and Precision Engineering, 1, 1, pp. 57-61, (2003)
  • [16] Arcona C., Dow T., An empirical tool force model for precision machining, Journal of Manufacturing Science and Engineering, 120, 4, pp. 700-707, (1998)
  • [17] To S., Kwok T.C., Cheung C.F., Study of ultra-preci-sion diamond turning of a microlens array with a fast tool servo system, Proceedings of International Society for Optical Engineering. Session 5.2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 6149, pp. 1-6, (2006)
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