Simulation and test ultra-precision diamond machining of microstructure

被引：0
作者：
Zhao, Qingliang [1 ]
Wang, Yilong [1 ]
Yu, Guang [1 ]
Yang, Yuanhua [1 ]
机构：
[1] School of Mechatronics Engineering, Harbin Institute of Technology
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2009年 / 45卷 / 12期
关键词：
Machining simulation; Microstructure surface; Ultra-precision diamond machining;
D O I：
10.3901/JME.2009.12.173
中图分类号：
学科分类号：
摘要：
In order to solve the problem of difficult prediction of the machined surface quality and the effects of machining conditions on cutting process in an economical and flexible way in ultra-precision diamond machining of microstructured surface. A dynamic simulation model for ultra-precision diamond machining of sine-wave microstructure is established. By using this model, one can not only estimate the surface topography and surface quality but also simulate the effect of cutting conditions such as the feed rate and spindle speed on the surface quality. The rerification test of the ultra-precision diamond machining of sine-wave microstructure is conducted, and a typical sine-wave microstructure with a form accuracy of 0.65μm and surface roughness of 45 nm is manufactured. Test results show that the establishment of the dynamic simulation model has important guide significance to the machining of microstructures. © 2009 Journal of Mechanical Engineering.
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页码：173 / 181
页数：8
相关论文
共 17 条
  • [1] Cheung C.F., Lee W.B., Modelling and simulation of surface topograhpy in ultra precision diamond turning, Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 214, 6, pp. 463-480, (2000)
  • [2] Luo X.C., Cheng K., Ward R., The effects of mach-ining process variables and tooling characterization on the surface generation: Modeling, simulation and application promise, International Journal of Advanced Manufacture Technology, 25, pp. 1089-1097, (2003)
  • [3] Lu Z., Yoneyama T., Micro cutting in the micro lathe turning system, International Journal of Machine Tools & Manufacture, 39, 7, pp. 1171-1183, (1999)
  • [4] Steven C.F., Production of X-ray optics by diamond turning and replication techniques, Proceedings of International Society for Optical Engineering. Faster, Cheaper, Smaller Space Science Optical Instruments Division, Symposium on Space Instrumentation and Dual-Use Technologies, 2214, pp. 278-285, (1994)
  • [5] Yu J., Yan J., Ultraprecision diamond turning of optical crystals, Proceedings of International Society for Optical Engineering. Faster, Cheaper, Smaller Space Science Optical Instruments Division. Symposium on Space Instrumentation and Dual-Use Technologies, 2214, pp. 51-59, (1994)
  • [6] Weck M., Stephen F., Manufacturing of micro-struc-tures using ultraprecision machine tools, Proceedings of International Society for Optical Engineering. Mechanical and Electrochemical Micromachining and Micromolding Division. Symposium on Design, Test, and Microfabrication of MEMS and MOEMS, 3680, pp. 450-455, (1999)
  • [7] Brinksmeier E., Preub W., Schmutz J., Manufac-ture of microstructures by diamond machining, Progress in Precision Engineering and Nanotechnology. Proceedings of the 9th International Precision Engineering Seminar and 4th International Conference on Ultraprecision in Manufacturing Engineering, pp. 503-507, (1997)
  • [8] Brinksmeier E., Preub W., Gessenharter A., Manufacturing of calibration standard by diamond machining, European Society for Precision Engineering and Nanotechnology. Proceedings of 2nd Euspen International Conference, pp. 680-683, (2001)
  • [9] Yan J., Maekawa K., Tamaki J., Micro grooving on single-crystal germanium for infrared fresnel lenses, Journal of Micromechanics and Micro-engineering, 15, 10, pp. 1925-1931, (2005)
  • [10] Weck M., Stephen F., Wos M., Fabrication of mic-rocomponents using ultraprecision machine tools, Nanotechnology, 8, 3, pp. 145-148, (1997)
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