Statistical analysis of natural frequencies of tuning fork vibratory micromachined gyroscope

被引：0
|
作者：
Jiang, Tao [1 ]
Wang, An-Lin [1 ]
Zhang, Ying [2 ]
Jiao, Ji-Wei [2 ]
机构：
[1] College of Mechanical Engineering, Tongji University, Shanghai 200092, China
[2] State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
来源：
Hangkong Xuebao/Acta Aeronautica et Astronautica Sinica | 2007年 / 28卷 / 01期
关键词：
Computer simulation - Finite element method - Micromachining - Natural frequencies - Silicon;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：245 / 248
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