Measurement of four-degree-of-freedom geometric errors of a linear stage based on telescope system

被引：0
|
作者：
Zhang, Hao [1 ]
Wu, Qinglin [1 ]
Duan, Shiyuan [1 ]
Lei, Zhangyuan [1 ]
Wang, Keyi [1 ]
机构：
[1] Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, Anhui 230027, China
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2009年 / 36卷 / SUPPL. 2期
关键词：
D O I：
10.3788/CJL200936s2.0223
中图分类号：
学科分类号：
摘要：
引用
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页码：223 / 226
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