Effects of nanoindentation depth and annealing temperature on microstructural evolution of Au/Cr/Si thin films

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Department of Mechanical Engineering, National Cheng King University, Tainan 70101, Taiwan [1 ]
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J Chin Soc Mech Eng Trans Chin Inst Eng Ser C | 2008年 / 4卷 / 281-287期
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High resolution transmission electron microscopy - Silicon compounds - Microstructure - Annealing - Crystalline materials - Nanoindentation - Unloading - Eutectics - Gold compounds - Gold deposits;
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