Structure, optical, and electrical properties of indium tin oxide thin films prepared by sputtering at room temperature and annealed in air or nitrogen

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作者：
Guillén, C. [1 ]
Herrero, J. [1 ]
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[1] Departamento de Energía, CIEMAT, Avda Complutense 22, 28040 Madrid, Spain
来源：
Journal of Applied Physics | 2007年 / 101卷 / 07期
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