Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation

被引：0

作者：

Lu, Qiu Yuan ^{[1
,2
]}

Li, Liu He ^{[1
,2
]}

Fu, Ricky K. Y. ^{[1
]}

Chu, Paul K. ^{[1
]}

机构：

[1] Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong

[2] Department 702, School of Mechanical and Automation Engineering, Beijing University of Aeronautics and Astronautics, Beijing, China

来源：

Journal of Applied Physics | 2008年 / 104卷 / 04期

关键词：

Ion implantation;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用