Self-noise analysis of the MEMS hydrophone

被引：0

作者：

Fang, Erzheng ^{[1
]}

Hong, Lianjin ^{[1
]}

Yang, Desen ^{[1
]}

机构：

[1] Acoustic Science and Technology Laboratory, Harbin Engineering University

来源：

Harbin Gongcheng Daxue Xuebao/Journal of Harbin Engineering University | 2014年 / 35卷 / 03期

关键词：

Hydrophone; Micro-electromechanical systems (MEMS); Noise measurement; Self-noise;

D O I：

10.3969/j.issn.1006-7043.201304018

中图分类号：

学科分类号：

摘要：

In response to some structural forms of hydrophone containing high self-noise, the structure analysis was derived based on the micro electromechanical systems (MEMS) sensor. In reference to the mechanical-thermal noise theory, the calculation method for hydrophone thermal noise and the conversion relationship between sound pressure and acceleration in aqueous media were given. The hydrophone noise parameters used for measuring radiated noise were simulated, and the main factors influencing the self-noise of the sensor were obtained. The relationships between self-noise and resonance frequency, and mass and Q were given. The typical hydrophone self-noise and the environmental noise of the ocean were compared. The simulation results show that the industrial acceleration sensor cannot be used in underwater acoustic radiation noise measurement tasks. The self-noise of MEMS sensors used in radiation noise measurement should be under 40 ng in order to meet the system requirements.

引用

页码：285 / 288

页数：3

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