Influence of flexible boundary and fringing field on the nonlinear dynamic performance of electrostatic microbeam resonators

被引：0
作者：
Chang Y. [1 ,2 ]
Zhang Q. [1 ]
Han J. [3 ]
机构：
[1] Tianjin Key Laboratory of Nonlinear Dynamics and Control, School of Mechanical Engineering, Tianjin University, Tianjin
[2] National & Local Joint Engineering Research Center of Metrology Instrument and System, Department of Mechanical Engineering, Hebei University, Baoding
[3] Tianjin Key Laboratory of High Speed Cutting and Precision Machining, School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin
来源：
Zhendong yu Chongji/Journal of Vibration and Shock | 2020年 / 39卷 / 18期
关键词：
Electrostatic microbeam resonator; Flexible boundary; Fringing effect; Galerkin method; Primary resonance; The method of multiple scales;
D O I：
10.13465/j.cnki.jvs.2020.18.016
中图分类号：
学科分类号：
摘要：
The deviation of an actual supporting system from the ideal supporting conditions is mainly caused by micromachining errors, manufacturing defects or innovative designs. It is necessary to analyse the influence of actual flexible boundary on the static and dynamic behaviors of mechanical components. Considering comprehensively the effects of neutral plane tension, fringing field and flexible boundary factors, a distributed mass model for electrostatically driven microbeam resonators was established. The effects of elastic boundary and fringing field on the static displacement and resonant frequency of the system were studied by using the Galerkin method. Furthermore, based on the convergent fifth-order discrete static solution, a single-DOF discrete model was introduced. The effects of elastic boundary and fringing field on the frequency response characteristics of the main resonance of the system were studied via the method of multiple scales. By comparing the above analysis results with the high-order Galerkin discretization results, the following conclusions are drawn. The flexible boundary leads to the displacement and rotation angle of the ends of the micro-beam, moreover, the resonant frequency is decreased, critical displacement is increased, static pull-in voltage is decreased and the magnitude of the amplitude-frequency curve is increased. The edge effect leads to the increase of electrostatic force and has a similar effect on the system as the flexible boundary. The results provide a theoretical basis for implementing energy-saving resonators. © 2020, Editorial Office of Journal of Vibration and Shock. All right reserved.
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页码：125 / 131
页数：6
相关论文
共 23 条
  • [1] SHANG Huilin, SONG Shufeng, WEN Yongpeng, Controlling pull-in instability of a typical electrostatically actuated microsensor with time-delay position feedback, Journal of Vibration and Shock, 35, 4, pp. 81-87, (2016)
  • [2] SHANG Huilin, HU Lili, WEN Yongpeng, Complex dynamics of the vibrating system of a micro mechanical resonator with electrostatic forces on both sides, Journal of Vibration and Shock, 37, 24, pp. 18-24, (2018)
  • [3] ZHANG Qichang, ZHOU Fansen, WANG Wei, Dynamic characteristics of a micro-mechanical-resonator with squeeze film damping, Journal of Vibration and Shock, 34, 17, pp. 124-130, (2015)
  • [4] MA Hechong, ZHANG Qichang, CHEN Tao, Et al., Static and dynamic characteristics of MEMS comb resonators considering fringe effect, Journal of Vibration and Shock, 37, 13, pp. 71-78, (2018)
  • [5] LIU Sujuan, QI Shuhao, ZHANG Wenming, Vibration behavior of a cracked micro-cantilever beam under electrostatic excitation, Journal of Vibration and Shock, 32, 17, pp. 41-45, (2013)
  • [6] YOUNIS M I, NAYFEH A H., A study of the nonlinear response of a resonant microbeam to an electric actuation, Nonlinear Dynamics, 31, 1, pp. 91-117, (2003)
  • [7] LI L, ZHANG Q C, WANG W, Et al., Dynamic analysis and design of electrically actuated viscoelastic microbeams considering the scale effect, International Journal of Non-Linear Mechanics, 90, pp. 21-31, (2017)
  • [8] RINALDI G, PACKIRISAMY M, STIHARU I., Quantitative boundary support characterization for cantilever MEMS, Sensors (Basel), 7, 10, pp. 2062-2079, (2007)
  • [9] ALKHARABSHEH S A, YOUNIS M I., Dynamics of MEMS arches of flexible supports, Journal of Microelectromechanical Systems, 22, 1, pp. 216-224, (2013)
  • [10] RINALDI G, PACKIRISAMY M, STIHARU I., Boundary characterization of MEMS structures through electro-mechanical testing, Sensors and Actuators A: Physical, 143, 2, pp. 415-422, (2008)
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