Fabrication of nanostructured PZT ferroelectric thin films and their characterization

被引：0
|
作者：
Zhu, Xin-Hua [1 ]
Song, Ye [1 ]
Hang, Qi-Ming [1 ]
Zhu, Jian-Min [1 ]
Zhou, Shun-Hua [1 ]
Liu, Zhi-Guo [1 ]
机构：
[1] National Laboratory of Solid State Microstructures, College of Physics, Nanjing University, Nanjing 210093, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2010年 / 41卷 / 11期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1959 / 1962
相关论文
共 50 条
  • [31] Preparation and properties of the ferroelectric thin PZT films.
    Czekaj, D
    Surowiak, Z
    Dudkevich, VP
    Bakirov, AA
    METAL/NONMETAL MICROSYSTEMS: PHYSICS, TECHNOLOGY, AND APPLICATIONS, 1996, 2780 : 230 - 234
  • [32] CHARACTERIZATION OF PZT FERROELECTRIC THIN FILMS PREPARED BY A MODIFIED SOL-GEL MOTHED
    Bao, Da-qun
    Zhang, Yi
    Guo, Hang
    Guo, Tao
    PROCEEDINGS OF THE 2008 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS, 2008, : 161 - +
  • [33] Characterization of PZT Ferroelectric Thin Films Prepared by A Modified Sol-Gel Method
    Guo, Hang
    Bao, Daqun
    Zhang, Yi
    2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008, : 2130 - 2133
  • [34] Characterization of PZT thin films for micromotors
    Muralt, P
    Kholkin, A
    Kohli, M
    Maeder, T
    Setter, N
    MICROELECTRONIC ENGINEERING, 1995, 29 (1-4) : 67 - 70
  • [35] Preparation and characterization of PZT thin films
    Bose, A.
    Sreemany, M.
    Halder, S. K.
    Bhattacharyya, D. K.
    Sen, Suchitra
    SMART DEVICES: MODELING OF MATERIAL SYSTEMS, 2008, 1029 : 279 - +
  • [36] GROWTH AND CHARACTERIZATION OF PZT THIN FILMS
    Bao, Daqun
    Zhang, Yi
    Guo, Hang
    MicroNano2008-2nd International Conference on Integration and Commercialization of Micro and Nanosystems, Proceedings, 2008, : 733 - 737
  • [37] Fabrication and Characterization of PZT/CuO Thin Film
    Sreesattabud, Tharathip
    Gibbons, Brady J.
    Watcharapasorn, Anucha
    Naksata, Manoch
    Jiansirisomboon, Sukanda
    INTEGRATED FERROELECTRICS, 2013, 148 (01) : 102 - 109
  • [38] FABRICATION OF FERROELECTRIC PZT THIN FILMS BY LIQUID DELIVERY MOCVD USING NOVEL Zr and Ti PRECURSORS
    Yeh, C. P.
    Lisker, M.
    Vezin, V.
    Seitzinger, B.
    Baumann, P. K.
    Garke, B.
    Blaesing, J.
    Krost, A.
    Burte, E. P.
    INTEGRATED FERROELECTRICS, 2008, 104 : 16 - 24
  • [39] Fabrication and characterization of ternary compound PMnN-PZT thin films on silicon substrates
    Zhang, Tao
    Zhang, Shu-Yi
    Li, Min
    Zhou, Sheng-Nan
    Sun, Bin
    Gongneng Cailiao/Journal of Functional Materials, 2012, 43 (13): : 1759 - 1761
  • [40] PZT thin films for low voltage actuation: Fabrication and characterization of the transverse piezoelectric coefficient
    Deshpande, Mandar
    Saggere, Laxman
    SENSORS AND ACTUATORS A-PHYSICAL, 2007, 135 (02) : 690 - 699
12345